Transistor with nitrogen-hardened gate oxide

ABSTRACT

The present invention provides an improved surface P-channel transistor and a method of making the same. A preferred embodiment of the method of the present invention includes providing a semiconductor substrate, forming a gate oxide layer over the semiconductor substrate, subjecting the gate oxide layer to a remote plasma nitrogen hardening treatment followed by an oxidative anneal, and forming a polysilicon layer over the resulting gate oxide layer. Significantly, the method of the present invention does not require nitrogen implantation through the polysilicon layer overlying the gate oxide and provides a surface P-channel transistor having a polysilicon electrode free of nitrogen and a hardened gate oxide layer characterized by a large concentration of nitrogen at the polysilicon electrode/gate oxide interface and a small concentration of nitrogen at the gate oxide/semiconductor substrate interface. The method of the present invention is easily incorporated into known fabrication processes and provides an enhanced surface P-channel transistor that resists hot electron degradation, is substantially impermeable to dopants included in overlying layers, and is characterized by a greatly increased extrapolated time dependent dielectric breakdown value.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a divisional of application Serial No. 09/585,688,filed Jun. 1, 2000, now U.S. Pat. No. 6,342,437 B1, issued Jan. 29,2002.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to semiconductor devices and methods fortheir fabrication. Specifically, the present invention relates tosurface P-channel transistors, including hardened gate oxides,possessing enhanced performance and reliability characteristics.

2. State of the Art

Higher performance, enhanced reliability, and greater packaging densityof integrated circuits are constant goals of the semiconductor industry.However, as components become smaller and smaller to meet these goals,it becomes increasingly difficult to produce semiconductor devicescapable of reliable, long-term operation, particularly in light of theoperational stresses each component of a state of the art semiconductordevice must endure. For example, as state of the art surface P-channeltransistors decrease in size, the size and thickness of the gate oxidesincluded in these transistors must also decrease, but as gate oxidesshrink, they become more permeable to dopants included in overlyingpolysilicon electrodes, less resistant to hot electron degradation, andmore susceptible to breakdown at voltages below normal operatingparameters.

To combat such problems, various processes for hardening gate oxideshave become essential to the fabrication of state of the artsemiconductor devices, and several hardening processes are well-known inthe art. For example, both furnace-based nitrogen processing and remoteplasma-based nitrogen hardening (“RPN”) may be used to harden gateoxides. Relative to nonhardened devices, gate oxides hardened by knownmethods are generally less permeable to dopants included in polysiliconelectrodes, more resistant to hot electron degradation, and lesssusceptible to breakdown at voltages below normal operating voltages.However, known processes for hardening gate oxides also have drawbacks.For example, after being subjected to such processes, gate oxides oftencontain a significant amount of unbound, or interstitial, nitrogen,which is mobile and may diffuse out of the gate oxide, reducing theeffectiveness of the hardening procedure and contaminating the overlyingpolysilicon electrode. Further, in order to prevent diffusion of dopantsfrom the polysilicon electrode and into and through the gate oxide,known hardening processes often provide a high concentration of nitrogenat the interface of the gate oxide and the underlying semiconductorsubstrate. However, as is known, excessive nitrogen at the gateoxide/substrate interface significantly degrades transistor performance.

In terms of device performance and reliability, it has been found to beadvantageous to fabricate a gate oxide having a large nitrogenconcentration (about 2.5% or greater nitrogen by atomic weight) at theinterface of the gate oxide and the overlying polysilicon electrodewhile having a small nitrogen concentration (about 0.5% nitrogen byatomic weight) at the gate oxide/substrate interface. The large nitrogenconcentration at the polysilicon electrode/gate oxide interfaceeffectively prevents diffusion of dopants from the polysilicon electrodeand into and through the gate oxide, while the small nitrogenconcentration at the gate oxide/substrate interface confers resistanceto hot electron degradation without substantially effecting deviceperformance. Yet known processing techniques do not reliably providesurface P-channel transistors including a gate oxide having a largenitrogen concentration at the polysilicon electrode/gate oxide interfaceand a small nitrogen concentration at the gate oxide/substrateinterface.

At least one method has been developed in an attempt to provide atransistor including a gate oxide having similar characteristics. U.S.Pat. No. 6,017,808 to Wang et al. (hereinafter “the '808 Patent”)describes a method for hardening a gate oxide designed to provide atransistor wherein a large peak of nitrogen exists within thepolysilicon and oxide layers at the interface of the gate oxide and theoverlying polysilicon electrode, while a relatively smaller nitrogenpeak occurs within the oxide layer and the underlying semiconductorsubstrate at the interface of the gate oxide and the underlyingsemiconductor substrate. To achieve this structure, the method of the'808 Patent requires implanting nitrogen through the polysilicon layerand into the gate oxide layer followed by an anneal step. After theimplantation and annealing steps, a first nitrogen peak occurs entirelywithin the polysilicon layer, a second nitrogen peak occurs within thepolysilicon layer and the gate oxide at the polysilicon/gate oxideinterface, and a third nitrogen peak occurs within the gate oxide layerand underlying substrate at the gate oxide/substrate interface. However,the first nitrogen peak located entirely within the polysilicon layer isproblematic because it retards diffusion of subsequently implanteddopants, such as boron, within the polysilicon layer. Therefore, themethod of the '808 patent requires removal of only the portion of thepolysilicon layer including the first nitrogen peak without removing theportion of the polysilicon layer including the second nitrogen peak.Once the portion of the polysilicon layer including the first nitrogenpeak is removed, an additional, nitrogen-free polysilicon layer may beoptionally formed over the remaining portion of the nitrogen implantedpolysilicon layer.

As will be readily appreciated, achieving the structure disclosed in the'808 Patent using the methods described therein is at best problematic,particularly in light of the continually decreasing thicknesses ofpolysilicon electrodes included in state of the art semiconductordevices. One of the most problematic aspects of the method described inthe '808 patent is the need to remove only the portion of the nitrogenimplanted polysilicon layer including the first nitrogen peak. Thereference teaches that this task may be accomplished using known wetetch, dry etch, or chemical mechanical polishing processes. However, thepolysilicon layers used for polysilicon electrodes in state of the arttransistors are exceedingly thin. The polysilicon electrodes of somestate of the art devices may be as thin as seven or fewer molecularmonolayers, and known etching and polishing processes are difficult tocontrol with sufficient precision to remove only predetermined portionsof material layers of such minute thicknesses. Moreover, in thiscontext, the polysilicon layer will include varying concentrations ofnitrogen at any given depth, and as the nitrogen concentration varies,the etch rate will also vary, making precise control of the etchingprocess even more difficult. Thus, removing only the portion of thepolysilicon layer including the first nitrogen peak is extremelydifficult, and known removal processes will most likely result inremoval of too much or too little polysilicon material, resulting intransistors exhibiting impaired performance or reduced reliability.

It would, therefore, be desirable to provide a method for fabricating asurface P-channel transistor which provides a surface P-channeltransistor including a hardened gate oxide characterized by a largenitrogen concentration at the polysilicon/gate oxide interface and asmall nitrogen concentration at the gate oxide/substrate interface, andwhich can be accomplished without the need to partially remove thepolysilicon layer overlying the gate oxide. Ideally, such a method couldbe easily incorporated into current fabrication processes and wouldreliably produce state of the art surface P-channel transistorsexhibiting enhanced performance and reliability.

BRIEF SUMMARY OF THE INVENTION

The method and device of the present invention answer the foregoingneeds. In a preferred embodiment, the present invention includes amethod for forming improved surface P-channel transistors includingproviding a semiconductor substrate and forming a gate oxide layer overthe semiconductor substrate. According to the method of the presentinvention, the gate oxide layer is subjected to a RPN treatment, whichincorporates a high concentration of nitrogen into an upper area of thegate oxide layer. Following the RPN treatment, the resultantintermediate structure is annealed in an environment including anoxygen-containing or nitrogen-containing oxidant. The anneal stepsmooths out the distribution of nitrogen within the gate oxide layer,reacts substantially all of the unbound or interstitial nitrogen leftafter the RPN treatment, and results in a gate oxide layer having alarge concentration of nitrogen near its upper surface and a smallconcentration of nitrogen at the interface of the gate oxide layer andthe underlying semiconductor substrate. Following the oxidative anneal,a polysilicon layer is formed over the gate oxide layer, and theresultant intermediate structure may be processed by known fabricationtechniques to define one or more surface P-channel transistors as wellas any other feature necessary to the proper function of a desiredsemiconductor device.

In an alternative embodiment, the gate oxide layer formed over thesemiconductor substrate may be formed in a nitrogen-containingenvironment to provide a gate oxide layer including a smallconcentration of nitrogen throughout its depth. The lightly nitridatedgate oxide layer is then subjected to a RPN treatment, resulting in agate oxide layer having a large concentration of nitrogen near its uppersurface and a smaller concentration of nitrogen at the interface of thegate oxide layer and the underlying semiconductor substrate. Once theRPN treatment is complete, the resultant intermediate structure may beprocessed by known fabrication techniques to define one or more surfaceP-channel transistors as well as any other feature necessary to theproper function of a semiconductor device.

As can be easily appreciated, the method of the present inventionenables fabrication of surface P-channel transistors including hardenedgate oxides characterized by a large concentration of nitrogen at itsupper surface and a small concentration of nitrogen at the interface ofthe gate oxide layer and the underlying semiconductor substrate.Moreover, the method of the present invention does not involve nitrogenimplantation of the oxide layer through an overlying polysilicon layer,and, as a result, does not require partial removal of a specific portionof the polysilicon layer for fabrication of a functioning and reliablepolysilicon electrode. Finally, the method of the present invention iseasily incorporated into processes for fabricating state of the artsemiconductor devices, and because it does not require partial removalof the polysilicon electrode layer, the method of the present inventionmay be applied even as feature dimensions of state of the artsemiconductor devices continue to decrease.

The surface P-channel transistors of the present invention are producedby the method of the present invention and include a semiconductorsubstrate, a substantially nitrogen-free polysilicon electrode, and ahardened gate oxide characterized by a large concentration of nitrogenat its upper surface and a small concentration of nitrogen at the gateoxide/substrate interface. Due to the physical characteristics of itshardened gate oxide, the surface P-channel transistor of the presentinvention exhibits performance and reliability advantages over knowndevices. For example, the surface P-channel transistor of the presentinvention does not exhibit the disadvantageous roll-off characteristicsof surface channel transistors including gate oxides having a largeconcentration of nitrogen at the gate oxide/substrate interface, yet thesurface P-channel transistor of the present invention possesses agreatly enhanced extrapolated time dependent dielectric breakdown(“TDDB”). Additionally, the gate oxide of a surface P-channel transistoraccording to the present invention preferably includes substantially nounbound or interstitial nitrogen. Therefore, the improved surfaceP-channel transistor of the present invention avoids many of thedifficulties associated with known surface channel transistors includingnitrogen-hardened gate oxides.

Other features and advantages of the present invention will becomeapparent to those of skill in the art through consideration of theensuing description, the accompanying drawings, and the appended claims.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

The drawings presented in conjunction with the description of thepresent invention are not actual views of any particular portion of anactual semiconducting device or component, but are merelyrepresentations employed to more clearly and fully depict the presentinvention.

FIG. 1 illustrates a semiconductor substrate covered by a gate oxidelayer having an upper surface;

FIG. 2 illustrates the structure of FIG. 1 after such structure has beensubjected to a RPN treatment;

FIG. 3 provides a graph illustrating the results of a binding energyanalysis performed on a gate oxide layer after the gate oxide layer wassubjected to a RPN treatment;

FIG. 4 provides a graph illustrating the results of a binding energyanalysis performed on a gate oxide layer after the gate oxide layer wassubjected to a RPN treatment and annealed in an N₂ environment;

FIG. 5 illustrates an intermediate semiconductor structure including asemiconductor substrate and a hardened gate oxide layer;

FIG. 6 illustrates another intermediate semiconductor structure createdby forming a polysilicon layer over the hardened gate oxide layer of theintermediate structure illustrated in FIG. 5; and

FIG. 7 illustrates one embodiment of the surface P-channel transistor ofthe present invention.

DETAILED DESCRIPTION OF THE INVENTION

The method of the present invention is relatively simple, may be easilyincorporated into existing fabrication processes, and reliably producesa surface P-channel transistor including a gate oxide that enhancesdevice performance and longevity.

In a preferred embodiment, the method of the present invention includesproviding a semiconductor substrate 10 having a gate oxide layer 12formed thereover, as is illustrated in drawing FIG. 1. The semiconductorsubstrate 10 maybe made of any suitable material known in the art, andthe gate oxide layer 12 can be formed over the semiconductor substrate10 using any known process using any suitable material known in the art.For example, the semiconductor substrate 10 may be fabricated usingsilicon and the gate oxide layer 12 may include silicon dioxide (SiO₂)which has been thermally grown or vapor deposited using well-knownmethods. The gate oxide layer 12 includes an upper surface 13 and may beformed in various thicknesses to suit various fabrication processes. Thegate oxide layer 12, however, will generally have a thickness of about70 Å or less, and for use in state of the art 0.18 μm technology, a gateoxide layer 12 having a thickness in the range of about 30 Å to 50 Å ispreferred.

After provision of the semiconductor substrate 10 having the gate oxidelayer 12 formed thereover, the gate oxide layer 12 is subjected to a RPNtreatment. The RPN treatment incorporates nitrogen into an upper area 14(depicted in FIG. 2) of the gate oxide layer 12, resulting in a largeconcentration of nitrogen at the upper surface 13 of the gate oxidelayer 12. As is shown in drawing FIG. 3, a graph of a binding energyanalysis of the gate oxide layer 12 after the RPN treatment, thenitrogen-containing upper area 14 of the gate oxide layer 12 includesunbound or interstitial nitrogen (indicated by the oxy-nitride peak 16)as well as silicon nitride (Si₃N₄) (indicated by the nitride peak 18).

RPN treatments are well documented in the art, and, as will beappreciated by the skilled artisan, any suitable RPN treatment may beused in the context of this invention. For example, a thermal RPNtreatment using microwave plasma to excite the nitrogen moleculesincluded in the process environment may be conducted at substantially750° C. for approximately two minutes. However, a high density plasma(HDP) RPN treatment is presently preferred.

Where a HDP RPN is used, the process may be conducted at between aboutsubstantially 60° C. and 65° C. for about 10 seconds using 1500 wattspower. Where a gate oxide layer having a thickness of substantially 30 Åis subjected to such an HDP RPN treatment, the highest concentration ofnitrogen (approximately 20.5% by atomic weight) will occur at the uppersurface 13 of the gate oxide layer 12, but the nitrogen will only extendapproximately substantially 9 Å within the substantially 30 Å gate oxidelayer. Therefore, the RPN treatment incorporates nitrogen in only theupper area 14 of the gate oxide layer 12.

As has been discussed, however, it is highly desirable to include asmall concentration of nitrogen at the interface of the gate oxide layer12 and the semiconductor substrate 10. In order to more progressivelydistribute, or “smooth out,” the nitrogen concentration within the gateoxide layer 12, the intermediate structure 20 (shown in drawing FIG. 2)formed by the RPN treatment is annealed in an environment containingeither an oxygen-containing oxidant or a nitrogen-containing oxidant.For example, the anneal may be conducted in an N₂ environment atsubstantially 800° C. for 60 seconds. However, various anneal processesare known in the art, and different anneal processes executed indifferent reactive environments, such as N₂O or NO environments, mayalso be used in the context of the present invention to achieve thedesired results.

Even after the anneal, the upper area 14 of the gate oxide layer 12includes a high concentration of nitrogen. However, during the anneal,the nitrogen is progressively incorporated throughout the depth 21 ofthe gate oxide layer 12, resulting in a small concentration of nitrogenat the interface 15 of the gate oxide layer 12 and the semiconductorsubstrate 10. Most preferably, the small concentration of nitrogen atthe gate oxide layer/semiconductor substrate interface 15 will equal anatomic concentration of about 0.5%. If significantly more nitrogen isincluded at the gate oxide layer/semiconductor substrate interface 15,the resulting transistor will exhibit increasing threshold voltage(V_(T)) roll-off, and if significantly less nitrogen is included at thegate oxide layer/semiconductor substrate interface 15, the gate oxidewill be more susceptible to hot electron degradation and the resultingtransistor will exhibit a lower TDDB. Additionally, though the largenitrogen concentration of the upper area 14 of the gate oxide layer 12may vary significantly, it is preferred that the concentration ofnitrogen at the upper surface 13 of the gate oxide layer 12 be at leastabout five times greater than the small nitrogen concentration includedat the gate oxide layer/semiconductor substrate interface 15, as it hasbeen determined that such a concentration is necessary to effectivelyblock dopant diffusion from the polysilicon electrode and into andthrough the upper area 14 of the gate oxide layer 12.

As can be appreciated by reference to drawing FIG. 3 and drawing FIG. 4,annealing the intermediate structure 20 resulting from the RPN treatmenthas an additional advantage. As already discussed, drawing FIG. 3provides a graph of a binding energy analysis of the gate oxide layer 12immediately following the RPN treatment. Again, as is demonstrated bythe oxy-nitride peak 16 and the nitride peak 18 shown in drawing FIG. 3,following the RPN treatment, the nitrogen-containing upper area 14 ofthe gate oxide layer 12 includes unbound or interstitial nitrogen aswell as Si₃N₄. As is evidenced by the information provided in drawingFIG. 4, however, after annealing the intermediate structure 20, the gateoxide layer 12 no longer includes a significant amount of interstitialnitrogen (indicated by the lack of a significant oxy-nitride peak) butincludes an increased amount of Si₃N₄, as is indicated by a secondnitride peak 22. Thus, annealing the first intermediate structure 20results in a second intermediate structure 24 (depicted in drawing FIG.5) including a semiconductor substrate 10 and a hardened gate oxidelayer 26 characterized by a large concentration of nitrogen at the uppersurface 28, a small concentration of nitrogen at the hardened gate oxidelayer/semiconductor substrate interface 30, and substantially no unboundor interstitial nitrogen.

Following the anneal step, a third intermediate structure 31(illustrated in drawing FIG. 6) is formed by forming a polysilicon layer32 over the hardened gate oxide layer 26. The polysilicon layer 32 isformed using any known process and may also be doped with boron or otherknown dopants such that the polysilicon layer 32 can be used to formpolysilicon electrodes with desired electrical properties. The thirdintermediate structure 31 is then processed as is known in the art toproduce a semiconductor device including at least one surface P-channeltransistor which incorporates a portion of the hardened gate oxide layer26 for a gate oxide as well as a portion of the overlying polysiliconlayer 32 for a polysilicon electrode.

The preferred embodiment of the method of the present invention,therefore, provides an enhanced surface P-channel transistor. The gateoxide produced by the method of the present invention prevents diffusionof dopant from the overlying polysilicon electrode, resists hot electrondegradation without adverse V_(T) roll-off effects, exhibits enhancedresistance to breakdown below normal operating voltages, and results ina surface P-channel transistor having a greatly increased TDDB. In fact,while transistors incorporating gate oxides hardened by RPN alone havean extrapolated TDDB of approximately 8 years, the method of thepreferred embodiment of the method of the present invention provides asurface P-channel transistor having an extrapolated TDDB of 500 years.

In an alternative embodiment of the method of the present invention, thehardened gate oxide layer is formed using a different process. Insteadof subjecting the gate oxide layer to a RPN treatment followed by ananneal, the gate oxide layer is formed in a nitrogen-containingenvironment to provide a slightly nitridated gate oxide layer, which issubsequently subjected to a RPN treatment to achieve a highconcentration of nitrogen in an upper area of the gate oxide layer. Thelightly nitridated gate oxide layer may be formed by executing a knownoxide deposition or growth process in a nitrogen-containing environment,but for reasons already discussed, the lightly nitridated gate oxidelayer should not include more than about 0.5% nitrogen by atomic weight.Moreover, as with the preferred embodiment of the method of the presentinvention, any suitable RPN treatment known in the art may be used. Thehardened gate oxide layer formed in the alternative embodiment of themethod of the present invention, therefore, will include a smallconcentration of nitrogen (no more than about 0.5%) at the interface ofthe hardened gate oxide and the underlying semiconductor substrate, aswell as a high concentration of nitrogen at its upper surface due to theRPN treatment.

The alternative embodiment of the method of the present invention alsoincludes forming a polysilicon layer over the hardened gate oxide layer.As was the case in the preferred embodiment of the method of the presentinvention, following formation of the polysilicon layer, the resultantintermediate structure may be processed as is known in the art toproduce a semiconductor device including at least one surface P-channeltransistor which incorporates a portion of the hardened gate oxide layerfor a gate oxide as well as a portion of the overlying polysilicon layerfor a polysilicon electrode. However, the alternative embodiment of themethod of the present invention is not preferred because the gate oxidelayer formed in the alternative embodiment includes a significant amountof interstitial nitrogen due to the lack of a post RPN anneal.

Nevertheless, as will be apparent to the skilled artisan, the method ofthe present invention does not involve nitrogen implantation into thegate oxide layer through an overlying polysilicon layer. The method ofthe present invention, therefore, does not necessitate the partialremoval of the overlying polysilicon layer to facilitate fabrication ofa high-performance, reliable polysilicon electrode. As a result, themethod of the present invention provides a more reliable and easilyexecuted technique for forming an enhanced surface P-channel transistor,particularly when the ever-shrinking dimensions of state of the artsemiconductor device features are considered.

The present invention also includes the enhanced surface P-channeltransistor 37 produced by the method of the present invention. As isillustrated in drawing FIG. 7, a surface P-channel transistor 37 of thepresent invention includes a semiconductor substrate 38, a gate oxide40, and a polysilicon electrode 42 overlying the gate oxide 40. The gateoxide 40 includes a large concentration of nitrogen (i.e., approximately2.5% or more nitrogen by atomic weight) near the interface 44 of thepolysilicon electrode 42 and the gate oxide 40, and the gate oxide 40includes a small concentration of nitrogen (i.e., approximately 0.5%nitrogen by atomic weight) at the interface 46 of gate oxide 40 and theunderlying semiconductor substrate 38. It should be understood however,that the surface P-channel transistor 37 of the present invention is notlimited to the features detailed herein and may include other well-knownfeatures. Moreover, the surface P-channel transistor 37 can befabricated in various sizes to suit virtually any application.

Due to the physical characteristics of the gate oxide 40 incorporatedtherein, the surface P-channel transistor 37 of the present inventionshows enhanced performance and reliability. The gate oxide 40 of thesurface P-channel transistor 37 of the present invention provides atransistor that possesses enhanced resistance to hot electrondegradation, less susceptibility to breakdown below normal operatingvoltages, substantially no V_(T) roll-off, and an extrapolated TDDB of500 years. Moreover, in contrast to the surface channel transistorformed by the method of the '808 Patent, the polysilicon electrode 42overlying the gate oxide 40 of the surface P-channel transistor 37 ofthe present invention is nitrogen-free, allowing for more effectivedistribution of the dopants. Therefore, the surface P-channel transistor37 of the present invention not only exhibits enhanced performance andreliability, but the surface P-channel transistor 37 of the presentinvention will not suffer from performance problems associated withdopant depletion regions in the polysilicon electrode 42 which mayresult from nitrogen implanted into and through the polysilicon layer.

Though the surface P-channel transistor and method of the presentinvention have been described herein with reference to specificexamples, such examples are for illustrative purposes only. The scope ofthe present invention is defined by the appended claims and is,therefore, not limited by the preceding description and drawings.

What is claimed is:
 1. A surface P-channel transistor, comprising: asubstrate having a top surface; a nitrogen-free polysilicon electrodehaving a bottom surface; and a hardened gate oxide disposed between thesubstrate and the nitrogen-free polysilicon electrode, the hardened gateoxide including about 0.5% nitrogen by atomic weight at an interfacewith the substrate, the nitrogen progressively increasing to comprisebetween 2.5% and 10.0% nitrogen by atomic weight at an interface withthe nitrogen-free polysilicon electrode, the hardened gate oxidehardened using a remote plasma-based nitrogen hardening treatment andannealed thereafter.
 2. The surface P-channel transistor of claim 1,wherein the nitrogen-free polysilicon electrode having the bottomsurface comprises a P-type dopant.
 3. The surface P-channel transistorof claim 2, wherein the P-type dopant is boron.
 4. The surface P-channeltransistor of claim 1, wherein the hardened gate oxide comprises ahardened gate oxide using a remote plasma-based nitrogen hardeningtreatment using a high density plasma process for approximately 60° C.for about 10 seconds using about 1500 watts of power.
 5. The surfaceP-channel transistor of claim 1, wherein the hardened gate oxidecomprises hardening gate oxide using a thermal remote plasma-basednitrogen hardening treatment process at approximately 750° C. for about2 minutes.
 6. The surface P-channel transistor of claim 1, wherein thehardened gate oxide comprises a hardened gate oxide annealed atapproximately 800° C. for approximately 60 seconds.
 7. A surfaceP-channel transistor, comprising: a substrate having a top surface; anitrogen-free polysilicon electrode having a bottom surface, theelectrode comprising a P-type dopant including boron; and a hardenedgate oxide disposed between the substrate and the nitrogen-freepolysilicon electrode, the hardened gate oxide including about 0.5%nitrogen by atomic weight at an interface with the substrate, thenitrogen progressively increasing to comprise between 2.5% and 10.0%nitrogen by atomic weight at an interface with the nitrogen-freepolysilicon electrode, the hardened gate oxide hardened using a remoteplasma-based nitrogen hardening treatment and annealed thereafter.